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URL: https://lnf.engin.umich.edu/
Proper Citation: University of Michigan Lurie Nanofabrication Core Facility (RRID:SCR_026764)
Description: Lurie Nanofabrication Facility serves technology educators and creators through broad access to advanced nanofabrication equipment and staff expertise in safe, collaborative environment. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology. We also encourage researchers from non-traditional disciplines to make use of our processes, such as metal and dielectric coatings, vacuum processes, fabrication of micro and nano components and metrology tools.
Synonyms: , Lurie Nanofabrication Facility, University of Michigan Lurie Nanofabrication Facility
Resource Type: access service resource, service resource, core facility
Keywords: ABRF, nanofabrication equipment, staff expertise, silicon integrated circuits, MEMS, III-V compound devices, organic devices, nanoimprint technology, metal and dielectric coatings, vacuum processes, fabrication of micro and nano components, metrology tools,
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