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URL: http://www.scienceexchange.com/facilities/nanofabrication-facility
Proper Citation: UConn Nanofabrication Facility (RRID:SCR_012346)
Description: THIS RESOURCE IS NO LONGER IN SERVICE. Documented on May 16, 20224. Nanofabrication Facility houses three instruments for patterning of flat surfaces and selective etching of materials. Researchers fabricate devices and structures to demonstrate novel device concepts and to characterize new materials. To carry out these functions this new facility consists of three instruments: a Tescan Electron-Beam Lithography Tool, an OAI high resolution Mask Aligner and Advanced Vacuum/Plasma Therm Reactive Ion Etcher.
Abbreviations: UConn Nanofabrication Facility
Synonyms: UConn Biotechnology - Bioservices Center Nanofabrication Facility, University of Connecticut Biotechnology - Bioservices Center Nanofabrication Facility
Resource Type: access service resource, core facility, service resource
Keywords: electron beam lithography, optical lithography, reactive ion etching
Availability: THIS RESOURCE IS NO LONGER IN SERVICE
Resource Name: UConn Nanofabrication Facility
Resource ID: SCR_012346
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Source: SciCrunch Registry (RRID:SCR_005400)
Description: Interactive portal for finding and submitting biomedical resources. Resources within SciCrunch have assigned RRIDs which are used to cite resources in scientific manuscripts. SciCrunch Registry, formerly NIF Registry, provides resources catalog. Allows to add new resources. Allows edit existing resources after registration. Curators are tasked with identifying and registering resources, examining data, writing configuration files to index and display data and keeping contents current.
URL: https://rrid.site/rin/sources/SCR_005400
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